JPH02120082U - - Google Patents
Info
- Publication number
- JPH02120082U JPH02120082U JP3072589U JP3072589U JPH02120082U JP H02120082 U JPH02120082 U JP H02120082U JP 3072589 U JP3072589 U JP 3072589U JP 3072589 U JP3072589 U JP 3072589U JP H02120082 U JPH02120082 U JP H02120082U
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- calibration sample
- handling device
- pallet
- indicates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3072589U JPH02120082U (en]) | 1989-03-15 | 1989-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3072589U JPH02120082U (en]) | 1989-03-15 | 1989-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120082U true JPH02120082U (en]) | 1990-09-27 |
Family
ID=31256041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3072589U Pending JPH02120082U (en]) | 1989-03-15 | 1989-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120082U (en]) |
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1989
- 1989-03-15 JP JP3072589U patent/JPH02120082U/ja active Pending